Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

We describe the design and operation of our high-throughput thin-film deposition flange which is used to perform combinatorial pulsed laser deposition (PLD). The portable flange allows us to convert different PLD systems into combinatorial PLD systems. The use of the flange is illustrated in fabrication of a discrete gas sensor library and an epitaxial composition spread. (C) 2003 Published by Elsevier B.V.