Improvement of dark current using InP/InGaAsP transition layer in large-area InGaAs MSM photodetectors

A large-area InGaAs metal-semiconductor-metal (MSM) photodetector with 1 X 1 mm(2) photoactive area for free-space optical communication applications has been designed, fabricated, and characterized. Interdigitated electrodes of 2-mum widths and 15-mum spacings are designed to maximize the responsivity, and enable MSM photodetectors to reach a maximum responsivity at 1.53-mum wavelength. By employing a two-step InP/InGaAsP transition layer, the dark current density of 45 fA/mum(2) was achieved at 10-V bias and at room temperature. Dark current-bias voltage curves were measured as a function of temperature from 40 to 270 K to estimate the activation energy. A 3-dB bandwidth of 210 MHz was obtained at a 10-V bias, and the measured result was compared with the designed bandwidth.