期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 98, 期 1, 页码 41-45出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2003.08.022
关键词
SnO2 thin films; gas response; kinetics; chemisorbed species
The present paper is devoted to systematic measurements of SnO2 gas response to reducing gases in transient mode. SnO2 films were deposited by spray pyrolysis from SnCl4-Water solution. The influence of operation temperature (25-500degreesC) on gas response (S) to CO and H-2 (0.1-0.5%), response time (tau), shape of S(T) curves, and activation energy of tau(1/kT) dependencies is discussed. Three operating temperature ranges with different activation energies of 0.3-0.38,0.6-0.7, and 1.1-1.4eV were selected on tau(1/kT) dependencies. The mechanism of oxygen and water influence on gas sensing characteristics of SnO2 films has been proposed. It was concluded that adsorption/desorption processes of molecular oxygen, hydroxyl groups, and atomic oxygen have dominant influence on electro-physical and gas sensing characteristics of SnO2 films in the temperature ranges of 25-150; 200-400 and >450degreesC, respectively. (C) 2003 Elsevier B.V. All rights reserved.
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