The Si(100) surface structures on n-type degenerately doped samples (rhosimilar to0.005 Omega cm) have been investigated with a scanning tunneling microscope (STM) at very low temperature (similar to5 K). We have developed a method to monitor quantitatively the proportion of the various observed surface structures [p(2X2), c(4 X 2) and flickering]. This study has been performed as a function of the tunnel current and the presence (or not) of surface defects in the observed areas. The normal surface areas having a low density of defects (similar to1%) have been observed to vary from the p(2 X 2) to the c(4X2) structures when the tunnel current increases. This indicates that the STM tip-surface interaction strongly influences the observed structures. Furthermore, surface areas completely free of any defects are dominated by flickering structures.
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