期刊
OPTICS COMMUNICATIONS
卷 232, 期 1-6, 页码 223-228出版社
ELSEVIER
DOI: 10.1016/j.optcom.2003.12.074
关键词
optical switch; thermo-optic; multimode interferometer; waveguide; anisotropy chemical etching
类别
A 2 x 2 thermo-optic (TO) Mach-Zehnder (MZ) switch based on silicon waveguides with large cross section was designed and fabricated on silicon-on-insulator (SOI) wafer. The multi-mode interferometers (MMI) were used as power splitter and combiner in MZ structure. In order to get smooth interface, anisotropy chemical wet-etching of silicon was used to fabricate the waveguides instead of dry-etching. Additional grooves were introduced to reduce power consumption. The device has a low switching power of 235 mW and a switching speed of 60 mus. (C) 2004 Elsevier B.V. All rights reserved.
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