Titanium sulfide thin films from the aerosol-assisted chemical vapour deposition of [Ti(SBut)4]

Gold, reflective TiS2 films have been produced from the single-source precursor [Ti(SBU1)(4)] by aerosol-assisted chemical vapour deposition on glass. Films were deposited between 150 and 300 degreesC using hexanes, dichloromethane or toluene solvent. The titanium sulfide films were analysed by Raman, UV-Vis spectroscopy, scanning electron microscopy (SEM), X-ray powder diffraction, energy dispersive analysis of X-rays (EDAX) and X-ray photoelectron spectroscopy (XPS).