期刊
DIAMOND AND RELATED MATERIALS
卷 13, 期 4-8, 页码 1480-1485出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2003.12.018
关键词
diamond-like carbon; Raman spectroscopy; coatings; mechanical properties
Storage density is presently doubling every year. This requires the read head to approach closer to the magnetic layer, and ever-thinner layers of carbon. Film thickness below 2 rim and roughness well below 1 nm are needed for the storage of similar to 1 Tb/in(2). Here we present an analytical and functional characterisation of ultra-thin carbon nitride and pure carbon films produced by magnetron sputtering and filtered high current vacuum are. The main focus is the effect of nitrogen composition and decreasing film thickness on the relevant mechanical and tribological properties. The carbon bonding has been monitored by using a combination of Raman spectra, taken at two wavelengths (514 and 244 nm). We show that the density, nitrogen content, scratching resistance and Young's modulus of ultra-thin films can all be monitored by the G peak dispersion. Also, the G peak full width at half maximum is a useful parameter in order to investigate the structural evolution of thin films. (C) 2003 Elsevier B.V. All rights reserved.
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