期刊
THIN SOLID FILMS
卷 453, 期 -, 页码 269-272出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2003.11.146
关键词
pulsed-laser deposition; ferromagnetic alloys; crystallised thin film
We have deposited highly crystalline thin films of the ferromagnetic alloy NiMnSb onto (100) silicon substrates kept at room temperature. The set-ups employed were single beam pulse laser deposition (1B-PLD) and, respectively, double beam pulse laser deposition (2B-PLD). In the case of the 2B-PLD two targets are simultaneously ablated and the two plumes overlap at a distance of 10 mm from the targets. The thin films obtained in both arrangements are crystalline, single phase and their stochiometries correspond to those of the targets. The surface morphology of films deposited by 2B-PLD is much improved [1] in comparison with that of the films produced in 1B-PLD. The XRD spectra show crystalline, slightly oriented films. The stoichiometry of the films has been further checked by energy dispersive X-ray (EDX) analysis while the size and density of droplets were determined by scanning electron microscopy (SEM). (C) 2003 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据