Laboratory evidence of a supersonic ion beam generated by a current-free helicon double-layer

An electric double-layer is generated near the open end of a high-density low pressure helicon sustained radio frequency (13.56 MHz) plasma source which expands into a diffusion chamber. Ion energy distribution functions measured with a retarding field energy analyzer placed in the diffusion chamber with its aperture facing the double-layer show the presence of a low energy peak (similar to29 V) around the local plasma potential and a high energy peak (similar to47 V) corresponding to a supersonic ion beam (similar to2.1c(s)). At an axial distance 12 cm downstream of the double-layer, the beam density is 14% of the local density at that position and the ion energy gain is approximately 70% of the potential drop of the double-layer. The ion beam is observed from the center out to a radius corresponding to that of the plasma source tube (-6.8cmless than or equal torless than or equal to+6.8 cm) and is not greatly affected by the expanding magnetic field. A depression in the total ion flux just downstream of the double-layer-previously measured on the main z-axis of the reactor-is also present across the chamber diameter. Evidence of an electron beam near the closed end of the source tube, generated via backwards acceleration through the double-layer, has been observed on a Langmuir probe trace. (C) 2004 American Institute of Physics.