期刊
IEEE TRANSACTIONS ON PLASMA SCIENCE
卷 32, 期 2, 页码 709-715出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2004.826133
关键词
cavity ring-down spectroscopy (CRDS); complex plasma; detuning; diagnostic; dust; Fabry-Perot (FP); laser diode; mode tuning; PECVD; silane; solar cells
We know that cavity ring-down spectroscopy (CRDS) can be of particular relevance in the study of the optical absorption of dust particles in a radio-frequency silane plasma. Although CRDS has historically primarily made use of pulsed lasers as light sources, the experimental design described here is based on 0.1-mW continuous wave multimode lead-salt laser diodes emitting in the midinfrared wavelength range. In order to interrupt the laser beam and reach similar effects to pulsed light sources, we propose a new method called mode tuning, based on a small detuning of the incoming laser wavelength. This work shows that CRDS has the potential to measure the dynamics of all radicals relevant in the particle nucleation process.
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