期刊
JOURNAL OF CRYSTAL GROWTH
卷 265, 期 1-2, 页码 53-59出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2004.01.038
关键词
antiphase boundary; growth mechanism; atomic layer epitaxy; metalorganic vapor phase epitaxy
The effects of atomic layer epitaxy (ALE) on the surface Morphology, the antiphase boundaries (APBs) and the dislocation density of GaAs grown on exactly (001)-oriented Ge/Si virtual substrates (VS) have been investigated. ALE combined with the insertion of a low temperature (<500degreesC) GaAs buffer layer led to a drastic reduction of the APBs and of the dislocation density (<5 x 10(5) cm(-2)), and to a reduction of the surface roughness, thus leading to an important improvement of the photo luminescence yield of InGaAs quantum well (QW) based structures. Light emitting diodes (LEDs) containing InGaAs/GaAs QWs have been realised on exactly (00 I)-oriented Ge/Si VS. We observed room-temperature continuous wave operation from these LEDs. (C) 2004 Elsevier B.V. All rights reserved.
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