期刊
APPLIED PHYSICS LETTERS
卷 84, 期 16, 页码 3187-3189出版社
AMER INST PHYSICS
DOI: 10.1063/1.1712028
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A micromachined PZT (52/48) thin film cantilever composed of SiO2/Ta/Pt/PZT/Pt/SiO2 on a SiNx supporting layer for simultaneous self-exciting and sensing was fabricated. We present the resonant frequency change of piezoelectric microcantilevers due to a combination of mass loading and spring constant variation arisen from antigen-antibody interaction of C-reactive protein (CRP). Experimentally measured resonant frequency shift is larger than that of theoretically calculated resonant frequency by two orders of magnitude due to a compressive stress arising from CRP antigen-antibody interaction. The changes in normalized resonant frequency shift deltaf(expt)/f(1)(expt) were found to increase as the value of 40.5, 74.7, and 185x10(-4) as the CRP antibody site ratio, increased 10%, 50%, and 100%, respectively. (C) 2004 American Institute of Physics.
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