Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

We demonstrate single-mode photonic wires in Silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.