Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips

We have batch fabricated ultrasensitive silicon cantilevers with integrated submicron magnetic tips and have characterized both their mechanical and magnetic properties. Cantilevers with spring constants as small as 10(-5) N/m were fabricated, with quality factors in the range of 2.5-3.5 X 10(4) and a force sensitivity as good as 64 X 10(-18) N Hz(-1/2) at room temperature in vacuum. Cantilever spring constants were measured by observing thermomechanical position fluctuations with a fiber optic interferometer, while resonance frequencies and quality factors were inferred from cantilever ring down transients. Polycrystalline nickel tips as small as 1.2 mum X 0.4 mum X 0.2 mum were fabricated on the cantilevers by electron beam lithography, thermal evaporation, and lift-off. Tip magnetic moments were inferred from the shift of the cantilever frequency versus magnetic field and show a 0.60 +/- 0.12 T saturation magnetization, indicating that less than 28 nm of oxide forms on the tips during processing. Force sensitivity was demonstrated by using the cantilevers to detect electron spin resonance at 115 K in the sample-on-cantilever configuration. (C) 2004 American Vacuum Society.