期刊
OPTICS EXPRESS
卷 12, 期 10, 页码 2120-2129出版社
OPTICAL SOC AMER
DOI: 10.1364/OPEX.12.002120
关键词
-
类别
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2). (C) 2004 Optical Society of America.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据