期刊
SURFACE SCIENCE
卷 557, 期 1-3, 页码 5-12出版社
ELSEVIER
DOI: 10.1016/j.susc.2004.02.039
关键词
growth; laser methods; laser induced thermal desorption (LITD); second harmonic generation methods; second harmonic generation; metallic films
A novel method is presented for a single pulse laser-patterning of variable width conducting lines on solid surfaces. Employing laser induced thermal desorption (LITD), potassium coverage grating on top of multilayer Xe is formed on Ru(0 0 1) at 20 K. Optical second harmonic-diffraction measurements were performed to characterize the grating as a function of Xe layer thickness and laser power density. Upon annealing to 80 K, the Xe layer desorbs and the metallic pattern softly lands on the substrate. The potential application of this procedure for the parallel writing of conducting wires millimeters long and less than 50 nm wide is discussed. (C) 2004 Elsevier B.V. All rights reserved.
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