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Radio-frequency glow discharge spectrometry: A critical review

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PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sab.2004.02.013

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bulk analysis; depth profiling; glow discharge; mass spectrometry; optical emission spectroscopy; plasma; radio frequency; speciation

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This paper presents a critical review of analytical radio frequency glow discharge spectrometry (rf-GDS). The historical foundations of rf-GDS are described, and current knowledge of the fundamental physics of analytical rf glow discharges is discussed. Additionally, instrumentation, methodologies, and applications of rf glow discharge optical emission spectrometry (rf-GDOES) and mass spectrometry (rf-GDMS) are reviewed. Although other rf-GDS techniques have appeared [e.g. rf glow discharge atomic absorption spectrophotometry (rf-GDAAS)], the emphasis is placed upon rf-GDOES and rf-GDMS, because they have received by far the most interest from analytical chemical metrologists. This review also provides explanations of some developments that are needed for further progress in the field of analytical rf-GDS. (C) 2004 Elsevier B.V. All rights reserved.

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