期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 16, 期 6, 页码 1528-1530出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2004.826781
关键词
integrated optics; optical resonators; optical switches; optical waveguide filters silicon-on-insulator (SOI); thermooptic effects
A tunable photonic crystal microcavity with in-filling holes has been experimentally realized by using the thermooptic effect. in silicon-on-insulator waveguide at lambda = 1530 nm. The device was fabricated by reactive, ion etching through the silicon core layer for high vertical confinement. A thin film heater has been integrated onto the microcavity. A small change in temperature (and consequent change in refractive index) was sufficient to cause an observable resonance shift. A resonance shift of 5 nm was achieved when the heater was switched on to a current of 1.2 mA (with switching power of about 9 mW).
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