期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 13, 期 3, 页码 441-451出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2004.828704
关键词
macromodeling; microelectromechanical systems (MEMS); microsystems; model-order reduction; nonlinear; simulation
In this paper, we present a new technique by combining the Taylor series expansion with the Arnoldi method to automatically develop reduced-order models for coupled energy domain nonlinear microelectromechanical devices. An electrostatically actuated fixed-fixed beam structure with squeeze-film damping effect is examined to illustrate the model-order reduction method. Simulation results show that the reduced-order nonlinear models can accurately capture the device dynamic behavior over a much larger range of device deformation than the conventional linearized model. Compared with the fully meshed finite-difference method, the model reduction method provides accurate models using orders of magnitude less computation. The reduced MEMS device models are represented by a small number of differential and algebraic equations and thus can be conveniently inserted into a circuit simulator for fast and efficient system-level simulation.
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