High frequency characteristics and soft magnetic properties of FeCoBN nanocrystalline films

For developing magnetic materials working in GHz ranges, the soft magnetic properties and high frequency characteristics were examined in as-deposited FeCoBN thin films fabricated by a reactive rf magnetron sputtering method. As a result, these films exhibited high ferromagnetic resonance frequency of 1.5-4 GHz and good soft magnetic properties, such as 4 piM(s) of 17 similar to 21 kG, rho of 50 similar to 220 muOmega cm, H-c of 3-90 Oe and H-k of 20-180 Oe. These magnetic properties of the films were discussed related to the microstructures. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.