期刊
THIN SOLID FILMS
卷 457, 期 1, 页码 174-179出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2003.12.018
关键词
plasma processing and deposition; nitriding; supersonic flow; thermodynamical non-equilibrium flow
Spectroscopic and electrostatic probe measurements were made to examine plasma characteristics under nitriding for a 10-kW-class direct-current arc plasma jet generator with a supersonic expansion nozzle in a low pressure environment. Heat fluxes into the plate from the plasma were also evaluated. Ammonia and mixtures of nitrogen and hydrogen were used as a working gas. The H-atom electronic excitation temperature and the N(2) molecule-rotational excitation temperature intensively decreased downstream in the nozzle although the NH molecule-rotational excitation temperature did not show an axial decrease. As approaching the titanium plate, the thermodynamical non-equilibrium plasma came to be a temperature-equilibrium one. Both the electron number density near the plate and the heat flux increased with H(2) mole fraction for mixtures gases. In cases with mixtures of N(2) and H(2), a radical of NH with a radially wide distribution was considered to contribute to the better nitriding as a chemically active and non-heating process. (C) 2003 Elsevier B.V. All rights reserved.
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