期刊
CHEMICAL VAPOR DEPOSITION
卷 10, 期 3, 页码 125-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/cvde.200304168
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Communication: Novel antenna edge microwave plasma CVD (AE-MPCVD) is used for the first time to grow CNFs (carbon nanofibers). The synthesis of CNFs on large-area substrates with high growth reproducibility is reported at low microwave power input and with remote deposition. A Growth area ten times as large as the plasma size generated is achieved by AE-MPCVD. Because of its structural simplicity, AE-MPCVD systems can easily be scaled up by applying multi-antenna edge arrays without considering complex microwave geometry or cavity and the total growth area and quality of CNFs are thus expected to be greatly improved.
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