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Quantitative microwave evanescent microscopy of dielectric thin films using a recursive image charge approach

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APPLIED PHYSICS LETTERS
卷 84, 期 23, 页码 4647-4649

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AMER INST PHYSICS
DOI: 10.1063/1.1759389

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A recursive image charge approach has been successfully developed for quantitative microwave microscopy of dielectric thin films using the scanning evanescent microwave microscope. With this approach and the recursion-to-circulation algorithm, frequency shift of the microscope as functions of the thickness of the film, dielectric constants of the film and the substrate can be efficiently computed in a circulation way. (C) 2004 American Institute of Physics.

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