期刊
MICROELECTRONIC ENGINEERING
卷 75, 期 1, 页码 31-42出版社
ELSEVIER
DOI: 10.1016/j.mee.2003.09.010
关键词
sensors; nanometer structures; integrated systems; dielectrophoresis; nano-assembly
We present a novel platform for the development and deployment of nanosensors in integrated systems. The nanosensor technology is based on striped high aspect ratio cylindrical structures grown using porous membranes as templates. These nanostructures are manipulated using dielectrophoretic forces, allowing their individual assembly and characterization. This assembly also enables the development of mixed-mode integrated circuits that include readout, signal processing, and communications circuitry, as well as the requisite layout for the post-IC assembly of the nanostructures. We report on preliminary designs of such mixed mode systems whose layouts integrate dielectrophoretic assembly sites with a rudimentary resistance read-out circuitry. (C) 2004 Published by Elsevier B.V.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据