Stretchable wavy metal interconnects

Buckled, wavy metal stripes are promising candidates for interconnects in flexible and stretchable electronics. To obtain wavy metal films, 5 nm of Cr (for adhesion) and 20 nm of Au were evaporated on polydimethyl siloxane (PDMS) prestretched by 25%. The metals buckle to a wave upon release of the PDMS from the prestretched position. The electrical resistance of the Au was measured as a function of applied tensile strain. Results show the metal remains electrically conductive up to 100% strain and maintains electrical continuity under repeated mechanical deformation. Presented are the sample fabrication, surface topography, and results of experiments conducted on these stretchable wavy metals. (C) 2004 American Vacuum Society.