期刊
APPLIED SURFACE SCIENCE
卷 272, 期 -, 页码 6-12出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2012.07.042
关键词
Laser-generated plasma; Ion collector; Mass quadrupole spectrometer
A Nd: YAG laser operating at 1064 nm wavelength, 150 mJ pulse energy and 3 ns pulse width, was employed to produce a non-equilibrium plasma by ablating several different targets (silicon, titanium, copper and germanium) at 5 x 10(9) W/cm(2) pulse intensity. The ion emission from the plasma was monitored through time-of-flight (TOF) measurements, performed by using an ion collector (IC) placed along the normal to the target surface. The deconvolution of the IC experimental spectra with a Coulomb-Boltzmann-shifted function permitted to evaluate the equivalent ion temperature and acceleration voltage, and the mean ion charge state developed inside the non-equilibrium plasma. A classical mass quadrupole spectrometer (MQS) was employed to detect ion charge states and plasma neutrals at various detection angles. The plasma fractional ionization, the ions and neutrals angular distribution and the ablation yield, as estimated through a MQS calibration process, were also evaluated. (C) 2012 Elsevier B.V. All rights reserved.
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