期刊
APPLIED SURFACE SCIENCE
卷 258, 期 8, 页码 3877-3881出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2011.12.051
关键词
Magnetron co-sputtering; Germanium carbide; Chemical bonding; Optical properties; Electrical properties
类别
资金
- National Natural Science Foundation of China [50972031, 51072039]
- Program for New Century Excellent Talents in University [NCET-10-0070]
- Specialized Research Fund for the Doctoral Program of Higher Education [200802131006]
- Astronautical Science Program of China [2009-HT-HGD-18]
Amorphous non-hydrogenated germanium carbide (a-Ge1-xCx) films have been prepared by magnetron co-sputtering method in a discharge of Ar. The dependence of structural and chemical bonding properties on the Ge/C ratio (R) has been investigated by X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. The relationship between the chemical bonding and the optical and electrical properties of the a-Ge1-xCx films has also been explored. It has been shown that the refractive index of the films increases from 2.9 to 4.4 and the optical gap decreases from 1.55 to 1.05 eV as R increases from 1.22 to 5.67. Moreover, the conductivity sigma increases clearly and the activation energy E-a decreases with the increasing R owing to the reduction of sp(3) C-Ge bonds. The a-Ge1-xCx films exhibit refractive index and optical gap values changing with x in a wide range, which may make a-Ge1-xCx films good candidates in the fields of protection coatings for IR windows and electronic devices. (C) 2011 Elsevier B.V. All rights reserved.
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