期刊
APPLIED SURFACE SCIENCE
卷 258, 期 20, 页码 8109-8116出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2012.05.004
关键词
SILAR; Temperature treatment; Ethylene glycol; ZnO thin films
类别
资金
- Bureau of Energy, Ministry of Economic Affairs of Taiwan, ROC. [101-D0204-6]
- National Science Council of Taiwan, ROC. [NSC 99-2221-E-024-009, NSC 98-3114-E009-002-CC2]
In this study, ZnO thin films were deposited on glass substrates by the successive ionic layer adsorption and reaction (SILAR) method, and the effect of the temperature treatment in ethylene glycol on the crystal structure, surface morphology, and optical properties of the films were investigated. When the temperature was below 85 degrees C, the ZnO films showed poor optical transmission and had a rough surface crystal structure. As the temperature was increased, dense polycrystalline films with uniform ZnO grain distribution were obtained. The optical transmittance of the ZnO thin films fabricated at temperatures greater than 95 degrees C was very high (90%) in the visible-light region. Therefore, it could be concluded that increasing the temperature of treatment in ethylene glycol helps in obtaining fine-grained ZnO films with a high growth rate and a low concentration of oxygen vacancies. However, temperatures greater than 145 degrees C led to shedding of ZnO from the surface and a reduction in the growth rate. Thus, temperature treatment was confirmed to play an important role in ZnO film deposition instead of post thermal annealing after the film growth. Crown Copyright (C) 2012 Published by Elsevier B.V. All rights reserved.
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