期刊
APPLIED SURFACE SCIENCE
卷 257, 期 3, 页码 736-740出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2010.07.051
关键词
Atomic layer deposition; Corona; Barrier; Packaging material; Silicon oxide; Aluminum oxide
类别
资金
- VTT
- Mets liitto Group
- Myllykoski Corporation
- Stora Enso Oyj
- UPM-Kymmene Oyj
The effect of corona pre-treatment on the performance of Al(2)O(3) and SiO(2) gas barrier layers applied by atomic layer deposition onto polymer-coated paperboards was studied. Both polyethylene and polylactide coated paperboards were corona treated prior to ALD. Corona treatment increased surface energies of the paperboard substrates, and this effect was still observed after several days. Al(2)O(3) and SiO(2) films were grown on top of the polymer coatings at temperature of 100 degrees C using the atomic layer deposition (ALD) technique. For SiO(2) depositions a new precursor, bis(diethylamido) silane, was used. The positive effect of the corona pre-treatment on the barrier properties of the polymer-coated paperboards with the ALD-grown layers was more significant with polyethylene coated paperboard and with thin deposited layers (shorter ALD process). SiO(2) performed similarly to Al(2)O(3) with the PE coated board when it comes to the oxygen barrier, while the performance of SiO(2) with the biopolymer-coated board was more moderate. The effect of corona pre-treatment was negligible or even negative with the biopolymer-coated board. The ALD film growth and the effect of corona treatment on different substrates require further investigation. (C) 2010 Elsevier B. V. All rights reserved.
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