期刊
NANOTECHNOLOGY
卷 15, 期 8, 页码 970-974出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/15/8/018
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In this paper, we report a novel method of fabricating patterned magnetic metal alloy CoCrPt nanodots via selective ion etching using a self-organized array of spherical domains of an ordered block copolymer (PS-b-PMMA) film as a template. Reactive ion etching and Ar+ ion milling were controlled accurately to avoid excess etching and pattern loss in the etching processes. The nanodot arrays had a dot density as high as approximately 10(11) dots cm(-2), and the magnetic hysteresis loops showed that the coercivity of the isolated CoCrPt dots made using the self-assembled block copolymer was considerably higher than that of the continuous magnetic film. The present method is applicable to other magnetic metals.
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