期刊
APPLIED SURFACE SCIENCE
卷 255, 期 10, 页码 5264-5266出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2008.07.105
关键词
Pulsed laser deposition; ZnO; Mg-doping
类别
资金
- Korea Science and Engineering Foundation [R01-2006-000-10396-0]
- National Research Foundation of Korea [R01-2006-000-10396-0] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Mg-doped ZnO thin films were fabricated by laser ablation of Zn:Mg targets consisting of Mg metallic strips and Zn disk in oxygen atmosphere with a goal to facilitate convenient control of Mg contents in the films. The characteristics of the deposited films were examined by analyzing their photoluminescence (PL), X-ray diffraction and X-ray photoelectron spectroscopy (XPS) spectra. Mg contents as analyzed by XPS indicate that the target composition is fairly transferred to the deposited films. The wurtzite structure of ZnO was conserved even for the highly doped ZnO films and there was no Mg- or MgO-related XRD peaks. With increase in the Mg content, the bandgap and PL peak energy shifted to blue and the Stokes shift became larger. (C) 2008 Elsevier B. V. All rights reserved.
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