期刊
APPLIED SURFACE SCIENCE
卷 255, 期 24, 页码 9843-9846出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2009.04.103
关键词
Alternative current plasma display panel (AC PDP); Indium tin oxide (ITO); Laser patterning
For cost effective fabrication and time of alternative current plasma display panels (AC PDPs), an indium tin oxide (ITO) layer was patterned directly with a Q-switched diode pumped Nd:YVO4 laser (lambda = 1064 nm). As experimental results, 500 mm/s scan speed with 40 kHz repetition rate was suitable for the application to AC PDP ITO electrode. In comparison with the chemically wet-etched ITO patterns by photolithography method, laser-ablated ITO patterns showed the formation of shoulders at the edge of the ITO lines and a ripple-like structure of the etched bottom. By dipping the laser-ablated ITO films in the chemical etching solution for 30 s at 50 degrees C, the shoulders were effectively removed without affecting the discharging properties of AC PDP. (C) 2009 Elsevier B. V. All rights reserved.
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