期刊
APPLIED SURFACE SCIENCE
卷 254, 期 13, 页码 3758-3761出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2007.11.053
关键词
nanosphere lithography; plasma-enhanced chemical vapor deposition; nanodots; nanorings
Nanosphere lithography (NSL) masks were created by spin-coating of polystyrene particles onto silicon surfaces. Fluorinated hydrocarbon films were coated on the nanosphere lithography masks using plasma-enhanced chemical vapor deposition (PECVD) to obtain ordered arrays of fluorinated hydrocarbon. Atomic force microscope images show hexagonally ordered nanodots of dimension 225 +/- 11 nm with a height of 23 +/- 4 nm. Every hexagon encloses a circular ring of diameter 540 +/- 24 nm having a height and width of 13.5 +/- 0.6 nm and 203 +/- 16 nm, respectively. FTIR analysis shows two distinct zones of atomic bonding of CHx and CFx in the plasma coated ordered fluorinated hydrocarbon films. (C) 2007 Elsevier B.V. All rights reserved.
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