期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 75, 期 8, 页码 2608-2612出版社
AMER INST PHYSICS
DOI: 10.1063/1.1688439
关键词
-
A widespread used construction for the coarse approach mechanism in scanning probe microscopy is the Besocke beetle type. Using stick-slip motion the scanner can thereby be positioned on the millimeter scale horizontally and vertically. This apparent advantage of a high flexibility is bought on the expense of a reduced mechanical stability. Here we present an analysis of the vibrational response of a beetle-type scanner and based on this, a very stable optimized scanner setup. In this setup, shear stack piezoelectric elements are used resulting in very high mechanical resonance frequencies and overall stability. (C) 2004 American Institute of Physics.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据