4.6 Article

Instant curvature measurement for microcantilever sensors

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APPLIED PHYSICS LETTERS
卷 85, 期 6, 页码 1083-1084

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AMER INST PHYSICS
DOI: 10.1063/1.1781389

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A multiple-point deflection technique has been developed for the instant measurement of microcantilever curvature. Eight light-emitting diodes are focused on various positions of a gold-coated silicon cantilever through optical fibers, and temperature change or chemical adsorption induces cantilever bending. The deflection at each point on the cantilever is measured with subnanometer precision by a position-sensitive detector, and thus the curvature of the cantilever is obtained. (C) 2004 American Institute of Physics.

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