期刊
APPLIED PHYSICS LETTERS
卷 105, 期 21, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4902562
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资金
- Air Force Office of Scientific Research [FA9550-11-1-0014]
- U.S. Department of Energy, Office of Basic Energy Sciences [DE-AC02-98CH10886]
- German Israel Foundation (GIF) [I-1026-9.14/2009]
- Alexander von Humboldt Foundation
- NASA Office of the Chief Technologist's Space Technology Research Fellowship
- AFOSR Quantum Memories MURI
- NSF Interdisciplinary Quantum Information Science and Engineering IGERT
A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q = 2.51 x 10(6)) photonic crystal cavities with low mode volume (V-m = 1.062 x (lambda/n)(3)), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 x 10(3). (C) 2014 AIP Publishing LLC.
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