期刊
APPLIED PHYSICS LETTERS
卷 104, 期 10, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4868720
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资金
- JSPS KAKENHI [25820129]
- Grants-in-Aid for Scientific Research [25820128, 25820129] Funding Source: KAKEN
We synthesized a mosaic diamond wafer 2 in. in size (40 x 60 mm(2)), which consisted of 24 single-crystal diamond (SCD) plates 10 x 10 mm(2) in area, by using microwave plasma chemical vapor deposition. Even by using a cloning technique, cracking frequently occurred and the non-uniformity was remarkable for wafers that were larger than 1 in. in size. This has not been observed in smaller samples before. Appropriate crystallographic directions could avoid the cracking and is one of the predominant factors in fabricating large area SCD wafers. Comparison with numerical simulations highlighted the importance of uniformity of the substrate temperature distribution on the uniformity of the growth. (C) 2014 AIP Publishing LLC.
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