期刊
APPLIED PHYSICS LETTERS
卷 105, 期 13, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4896991
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资金
- Stichting Technologie en Wetenschap (STW) [10448]
- Carl Zeiss SMT GmbH
Integration of PbZr0.52Ti0.48O3 (PZT) films on glass substrates is of high importance for device applications. However, to make use of the superior ferro-and piezoelectric properties of PZT, well-oriented crystalline or epitaxial growth with control of the crystal orientation is a prerequisite. In this article, we report on epitaxial growth of PZT films with (100)- and (110)-orientation achieved by utilizing Ca2Nb3O10 (CNO) and Ti0.87O2 (TO) nanosheets as crystalline buffer layers. Fatigue measurements demonstrated stable ferroelectric properties of these films up to 5 x 10(9) cycles. (100)-oriented PZT films on CNO nanosheets show a large remnant polarization of 21 mu C/cm(2) that is the highest remnant polarization value compared to (110)-oriented and polycrystalline films reported in this work. A piezoelectric response of 98 pm/V is observed for (100)-oriented PZT film which is higher than the values reported in the literature on Si substrates. (C) 2014 AIP Publishing LLC.
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