相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Ultrathin Multifunctional Oxide Coatings for Lithium Ion Batteries
Xingcheng Xiao et al.
ADVANCED MATERIALS (2011)
Thickness effects on the lithiation of amorphous silicon thin films
Sumit K. Soni et al.
SCRIPTA MATERIALIA (2011)
Atomic Layer Deposition: An Overview
Steven M. George
CHEMICAL REVIEWS (2010)
Oxygen deficiency defects in amorphous Al2O3
T. V. Perevalov et al.
JOURNAL OF APPLIED PHYSICS (2010)
Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton-Exchange Membrane Fuel Cells
Chueh Liu et al.
SMALL (2009)
Nanoindentation investigation of HfO2 and Al2O3 films grown by atomic layer deposition
K. Tapily et al.
JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2008)
Ultralow loading Pt nanocatalysts prepared by atomic layer deposition on carbon aerogels
Jeffrey S. King et al.
NANO LETTERS (2008)
Synthesis and surface engineering of complex nanostructures by atomic layer deposition
Mato Knez et al.
ADVANCED MATERIALS (2007)
Atomic layer deposition of polyimide thin films
Matti Putkonen et al.
JOURNAL OF MATERIALS CHEMISTRY (2007)
The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems
Marie K. Tripp et al.
SENSORS AND ACTUATORS A-PHYSICAL (2006)
Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
B. Hoex et al.
APPLIED PHYSICS LETTERS (2006)
Low-temperature Al2O3 atomic layer deposition
MD Groner et al.
CHEMISTRY OF MATERIALS (2004)
High-filling-fraction inverted ZnS opals fabricated by atomic layer deposition
JS King et al.
APPLIED PHYSICS LETTERS (2003)
Conformal coating on ultrahigh-aspect-ratio nanopores of anodic alumina by atomic layer deposition
JW Elam et al.
CHEMISTRY OF MATERIALS (2003)
Improved nucleation of TiN atomic layer deposition films on SILK low-k polymer dielectric using an Al2O3 atomic layer deposition adhesion layer
JW Elam et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2003)
Atomic layer deposition of hafnium and zirconium oxides using metal amide precursors
DM Hausmann et al.
CHEMISTRY OF MATERIALS (2002)
Atomic layer deposition (ALD):: from precursors to thin film structures
M Leskelä et al.
THIN SOLID FILMS (2002)
Testing ultra-thin films by laser-acoustics
D Schneider et al.
SURFACE & COATINGS TECHNOLOGY (2000)