期刊
APPLIED PHYSICS LETTERS
卷 105, 期 6, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4892539
关键词
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资金
- Vehicle Technologies Office of the U.S. Department of Energy [DE-AC02-05CH11231, 7056410]
- National Science Foundation [CMMI 1000726]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [1000726] Funding Source: National Science Foundation
- Office of Integrative Activities
- Office Of The Director [1355438] Funding Source: National Science Foundation
The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al2O3 films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications. (C) 2014 AIP Publishing LLC.
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