期刊
JETP LETTERS
卷 102, 期 8, 页码 544-547出版社
MAIK NAUKA/INTERPERIODICA/SPRINGER
DOI: 10.1134/S0021364015200047
关键词
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资金
- Ministry of Education and Science of the Russian Federation [14.576.21.0065, RFMEFI57614X0065, 14.575.21.0027, RFMEFI57514X0027]
- Russian Science Foundation [14-19-00192]
The charge transport mechanism in thin amorphous and ferroelectric Hf0.5Zr0.5O2 films has been studied. It has been shown that the transport mechanism in studied materials does not depend on the crystal phase and is phonon-assisted tunneling between traps. The comparison of the experimental current-voltage characteristics of TiN/Hf0.5Zr0.5O2/Pt structures with the calculated ones provides the trap parameters: thermal energy of 1.25 eV and the optical energy of 2.5 eV. The trap concentration has been estimated as similar to 10(19)-10(20) cm(-3).
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