期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 115, 期 1, 页码 151-158出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2004.04.024
关键词
micromachining; diaphragm; stiction; dry release; microheater; micropump
This paper presents the design, fabrication, and testing of a thermally driven micropump fabricated by surface micromachining. The micropump consists of a membrane of a corrugated diaphragm, a sealed cavity filled with air and buried with n(+) polysilicon microheater and a microchannel with a pair of nozzle and diffuser valves. The polysilicon membrane was used as a structural layer and low-temperature oxide (LTO) and plasma enhanced chemical vapor deposition (PECVD) oxide as a sacrificial layer. Using gas-phase etching (GPE) process with anhydrous hydrogen fluoride (HF) gas and isopropyl alcohol (IPA) vapor, we successfully fabricated the thermally driven micropmump with no virtually process-induced stiction. The flow rate of the micropump is measured at the applied voltage of 25 V with the duty cycle of 50%. The maximum flow rate of the micropump with the corrugated diaphragm is about 3.1 mul/min at 5 Hz. (C) 2004 Elsevier B.V. All rights reserved.
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