期刊
APPLIED PHYSICS LETTERS
卷 105, 期 5, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4891540
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资金
- German Research Foundation (DFG) as part of the Collaborative Research Center [SFB855]
We present a fully integrated microelectromechanical magnetic field sensor based on the Delta E effect. The vacuum encapsulated sensor extends our previous approach [B. Gojdka et al., Appl. Phys. Lett. 99, 223502 (2011); Nature 480, 155 (2011)] and now involves an intermediate piezoelectric AlN layer between a SiO2 cantilever and a magnetostrictive FeCoBSi top layer. The AlN layer serves two functions: It drives the resonator, and it is used for electrical read out. The limit of detection was strongly enhanced to 12 nT/root Hz p at 10 Hz. (C) 2014 AIP Publishing LLC.
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