4.6 Article

Enhanced hardness in epitaxial TiAlScN alloy thin films and rocksalt TiN/(Al,Sc)N superlattices

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APPLIED PHYSICS LETTERS
卷 105, 期 15, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.4898067

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  1. National Science Foundation
  2. U.S. Department of Energy [CBET-1048616]
  3. Department of Energy National Nuclear Security Administration [DE-FC52-08NA28752]
  4. Linkoping University
  5. Swedish Research Council (the RAC Frame Program) [2011-6505]
  6. Swedish Research Council (Linnaeus Grant) [LiLi-NFM]

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High hardness TiAlN alloys for wear-resistant coatings exhibit limited lifetimes at elevated temperatures due to a cubic-AlN to hexagonal-AlN phase transformation that leads to decreasing hardness. We enhance the hardness (up to 46 GPa) and maximum operating temperature (up to 1050 degrees C) of TiAlN-based coatings by alloying with scandium nitride to form both an epitaxial TiAlScN alloy film and epitaxial rocksalt TiN/(Al,Sc)N superlattices on MgO substrates. The superlattice hardness increases with decreasing period thickness, which is understood by the Orowan bowing mechanism of the confined layer slip model. These results make them worthy of additional research for industrial coating applications. (C) 2014 AIP Publishing LLC.

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