期刊
APPLIED PHYSICS LETTERS
卷 102, 期 1, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4773247
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资金
- National Science Council of the Republic of China, Taiwan [NSC 100-2221-E-005-092-MY3]
- Central Taiwan Science Park, Taiwan [101A08]
- Ministry of Economic Affairs [100-EC-17-A-07-S1-158]
In this work, a single-crystalline beta-Ga2O3 epilayer was grown on (0001) sapphire at low temperature by low-pressure metal organic chemical vapor deposition. The optimized parameters for the chamber pressure, oxygen flow, and growth temperature were 15 Torr, 200 sccm, and 500 degrees C, respectively. The beta-Ga2O3 epilayer was fabricated as a metal-semiconductor-metal solar-blind deep ultraviolet photodetector. Due to the gallium oxide grown at low temperature, the as-grown beta-Ga2O3 epilayer was annealed at 800 degrees C in atmosphere or in a nitrogen environment. The effects of defects of the beta-Ga2O3 epilayer before and after N-2 annealing were studied using x-ray diffraction system, cathodoluminescence at differential temperature, and Hall measurement. The beta-Ga2O3 epilayer that was N-2 annealed for 15min presented better photodetector performance than the as-grown beta-Ga2O3 epilayer. The annealed epilayer exhibited a dark current of 1.6 x 10(-13) A under 5 V bias. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4773247]
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