期刊
APPLIED PHYSICS LETTERS
卷 102, 期 2, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4788724
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资金
- DARPA/MTO ORCHID program through a grant from the Air Force Office of Scientific Research (AFOSR)
- National Science Foundation CAREER award
- Packard Fellowship in Science and Engineering
We present a monolithic integrated aluminum nitride (AlN) optomechanical resonator in which the mechanical motion is actuated by piezoelectric force and the displacement is transduced by a high-Q optical cavity. The AlN optomechanical resonator is excited from a radio-frequency electrode via a small air gap to eliminate resonator-to-electrode loss. We observe the electrically excited mechanical motion at 47.3 MHz, 1.04 GHz, and 3.12 GHz, corresponding to the 1st, 2nd, and 4th radial-contour mode of the wheel resonator, respectively. An equivalent circuit model is developed to describe the observed Fano-like resonance spectrum. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4788724]
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