期刊
APPLIED PHYSICS LETTERS
卷 103, 期 13, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4821917
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资金
- Defense Advanced Research Projects Agency (QuASAR program)
- AFOSR MURI [FA9550-12-1-0025]
- Natural Science and Engineering Council (NSERC) of Canada
- EU [IOF-2009-254996]
With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an angled-etching methodology are reported. Resonance frequencies displayed evidence of significant compressive stress in doubly clamped diamond nanobeams, while cantilever resonance modes followed the expected inverse-length-squared trend. Q-factors on the order of 10(4) were recorded in high vacuum. Results presented here represent initial groundwork for future diamond-based nanomechanical systems which may be applied in both classical and quantum applications. (C) 2013 AIP Publishing LLC.
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