4.6 Article

Metal induced inhomogeneous Schottky barrier height in AlGaN/GaN Schottky diode

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APPLIED PHYSICS LETTERS
卷 102, 期 24, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.4811756

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  1. National Research Foundation of Korea (NRF)
  2. Ministry of Science, ICT and Future Planning [2013R1A1A1007296]
  3. National Research Foundation of Korea [2013R1A1A1007296] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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The dependence of barrier height inhomogeneity on the gate metal has been investigated for the AlGaN./GaN Schottky diode. The analysis from the electroreflectance spectroscopy measurement for different types of Schottky gate metals tried (in this case, Au, Pt, Pd, and Ni) reveals that the surface donor states of AlGaN./GaN heterostructure strongly depends on the type of Schottky gate metals used, which suggests that barrier height inhomogeneity is strongly dependent on the gate metal. The X-ray photoelectron spectroscopy also reveals a strong correlation between the barrier height inhomogeneity and the gate metal type. (C) 2013 AIP Publishing LLC.

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