期刊
APPLIED PHYSICS LETTERS
卷 103, 期 14, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4823827
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资金
- Fulbright Scholar grant
- Austrian Science Fund (FWF) [J3168-N20]
- National Research Foundation
- Ministry of Education, Singapore
- U.S. Department of Energy [DE-AC02-05CH11231]
- Austrian Science Fund (FWF) [J 3168] Funding Source: researchfish
- Austrian Science Fund (FWF) [J3168] Funding Source: Austrian Science Fund (FWF)
Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E x B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons. (C) 2013 AIP Publishing LLC.
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