Characterisation of fine-scale microstructures by electron backscatter diffraction (EBSD)

Recent developments in instrumentation and software now enable grain structures >0.1 mum to be quantitatively characterised by EBSD in conjunction with a field emission gun scanning electron microscope. The paper discusses the advantages and limitations of the technique. (C) 2004 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.